Introductory MEMS : fabrication and applications

By:

Adams, Thomas M

Contributor(s):

Layton, Richard A

Material type: Text

TextPublication details: New Delhi Springer India 2014Description: xv, 444 pISBN:

9788132206637

Subject(s):

DDC classification:

621.381 ADA/I

Contents:

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

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Item type	Current library	Call number	Copy number	Status	Barcode
Reference	IIIT Kottayam Central Library Reference	621.381 ADA/I (Browse shelf(Opens below))		Not For Loan	2481
Books	IIIT Kottayam Central Library General Stacks	621.381 ADA/I;1 (Browse shelf(Opens below))	1	Available	2482
Books	IIIT Kottayam Central Library General Stacks	621.381 ADA/I;2 (Browse shelf(Opens below))	2	Available	2483

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Includes bibliographical references and index.

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