Introductory MEMS : fabrication and applications
Adams, Thomas M.
Introductory MEMS : fabrication and applications - New Delhi Springer India 2014 - xv, 444 p. :
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
9788132206637
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS
621.381 / ADA/I
Introductory MEMS : fabrication and applications - New Delhi Springer India 2014 - xv, 444 p. :
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
9788132206637
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS
621.381 / ADA/I
