Introductory MEMS (Record no. 2443)
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000 -LEADER | |
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fixed length control field | 01011nam a22002057a 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
ISBN | 9788132206637 |
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381 |
Item number | ADA/I |
100 1# - MAIN ENTRY--AUTHOR NAME | |
Personal name | Adams, Thomas M. |
245 10 - TITLE STATEMENT | |
Title | Introductory MEMS |
Sub Title | : fabrication and applications |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication | New Delhi |
Name of publisher | Springer India |
Year of publication | 2014 |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | xv, 444 p. : |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc | Includes bibliographical references and index. |
505 0# - FORMATTED CONTENTS NOTE | |
Formatted contents note | 1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Microelectromechanical systems. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Electronic apparatus and appliances. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Transducers. |
650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | MEMS |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Layton, Richard A. |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Books |
Withdrawn status | Lost status | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Full call number | Accession Number | Price effective from | Koha item type | Copy number |
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Not For Loan | IIIT Kottayam Central Library | IIIT Kottayam Central Library | Reference | 01/02/2025 | Aditya Books, 2024-25/022 dtd 24-09-2024 | 795.00 | 621.381 ADA/I | 2481 | 01/02/2025 | Reference | ||||
IIIT Kottayam Central Library | IIIT Kottayam Central Library | General Stacks | 01/02/2025 | Aditya Books, 2024-25/022 dtd 24-09-2024 | 795.00 | 621.381 ADA/I;1 | 2482 | 01/02/2025 | Books | 1 | ||||
IIIT Kottayam Central Library | IIIT Kottayam Central Library | General Stacks | 01/02/2025 | Aditya Books, 2024-25/022 dtd 24-09-2024 | 795.00 | 621.381 ADA/I;2 | 2483 | 01/02/2025 | Books | 2 |