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Foundations of MEMS

Liu Chang

Foundations of MEMS - 2nd ed. - Noida Pearson Education 2024 - 576p.

ISBN: 9788131764756

Subjects--Topical Terms:
Microelectromechanical systems.
Microfabrication
Piezzo electric Effect

Dewey Class. No.: 621.381 / LIU/F

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