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MEMS and Microsystems : Design, Manufacture, and Nanoscale Engineering

Hsu Tai-Ran.

MEMS and Microsystems : Design, Manufacture, and Nanoscale Engineering - 2nd ed. - Hoboken, N.J. : John Wiley, c2008. - xxv, 550 p.

ISBN: 9780470083017

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Microsystems Fabrication Processes
Thermofluid Engineering
Microsystems Design
Nanoscale Engineering

Dewey Class. No.: 621.381 / HSU/M

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