000			00651nam a22002177a 4500
020			_a9780470083017
082	0	0	_a621.381 _bHSU/M
100	1		_aHsu Tai-Ran.
245	1	0	_aMEMS and Microsystems _b: Design, Manufacture, and Nanoscale Engineering
250			_a2nd ed.
260			_aHoboken, N.J. : _bJohn Wiley, _cc2008.
300			_axxv, 550 p.
650		0	_aMicroelectronics.
650		0	_aMicroelectromechanical systems.
650		0	_aMicroelectronic packaging.
650		0	_aMicrosystems Fabrication Processes
650		0	_aThermofluid Engineering
650		0	_aMicrosystems Design
650		0	_aNanoscale Engineering
942			_cREF
999			_c1970 _d1970