TY  - BOOK
AU  - Liu Chang
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.381 
PY  - 2024///
CY  - Noida
PB  - Pearson Education
KW  - Microelectromechanical systems
KW  - Microfabrication
KW  - Piezzo electric Effect
ER  -