Liu Chang <br/><br/>
Foundations of MEMS 

 - 2nd ed. 
 - Noida  Pearson Education  2024 
 - 576p. 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microfabrication<br/>Piezzo electric Effect
<br/><br/><label>Dewey Class. No.: </label>621.381  / LIU/F