TY  - BOOK
AU  - Hsu Tai-Ran
TI  - MEMS and Microsystems : : Design, Manufacture, and Nanoscale Engineering 
SN  - 9780470083017 
U1  - 621.381  
PY  - 2008///
CY  - Hoboken, N.J.
PB  - John Wiley
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
KW  - Microsystems Fabrication Processes
KW  - Thermofluid Engineering
KW  - Microsystems Design
KW  - Nanoscale Engineering
ER  -