Hsu Tai-Ran.
MEMS and Microsystems : Design, Manufacture, and Nanoscale Engineering
- 2nd ed.
- Hoboken, N.J. : John Wiley, c2008.
- xxv, 550 p.
9780470083017
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Microsystems Fabrication Processes
Thermofluid Engineering
Microsystems Design
Nanoscale Engineering
621.381 / HSU/M